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    Structural, Electrical and Dielectric Properties of DC Reactive Magnetron Sputtered ZrO~2 Films for Metal-Oxide-Semiconductor Devices

    New search for: Kondaiah, P.
    New search for: Uthanna, S.

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    Structural, Electrical and Dielectric Properties of DC Reactive Magnetron Sputtered ZrO~2 Films for Metal-Oxide-Semiconductor Devices

    New search for: Kondaiah, P.
    New search for: Uthanna, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structural, Electrical and Dielectric Properties of DC Reactive Magnetron Sputtered ZrO~2 Films for Metal-Oxide-Semiconductor Devices

    New search for: Kondaiah, P.
    New search for: Uthanna, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Structural, Electrical and Dielectric Properties of DC Reactive Magnetron Sputtered ZrO~2 Films for Metal-Oxide-Semiconductor Devices

    Contributors:

    Kondaiah, P. (author) / Uthanna, S. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 781 ; 155-166

    Publication date:

    2014-01-01

    Size:

    12 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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