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AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates
AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates
AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates
Dallaeva, D. (author) / Talu, S. (author) / Stach, S. (author) / Skarvada, P. (author) / Tomanek, P. (author) / Grmela, L. (author)
APPLIED SURFACE SCIENCE ; 313 ; 81-86
2014-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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