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UV/ozone surface treatment increases hydrophilicity and enhances functionality of SU-8 photoresist polymer
UV/ozone surface treatment increases hydrophilicity and enhances functionality of SU-8 photoresist polymer
UV/ozone surface treatment increases hydrophilicity and enhances functionality of SU-8 photoresist polymer
Delplanque, A. (author) / Henry, E. (author) / Lautru, J. (author) / Leh, H. (author) / Buckle, M. (author) / Nogues, C. (author)
APPLIED SURFACE SCIENCE ; 314 ; 280-285
2014-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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