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    Fabrication and Packaging of Electromagnetic 2D MEMS Scanning Mirror

    New search for: Zhang, C.
    New search for: Tang, F.

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    Fabrication and Packaging of Electromagnetic 2D MEMS Scanning Mirror

    New search for: Zhang, C.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fabrication and Packaging of Electromagnetic 2D MEMS Scanning Mirror

    New search for: Zhang, C.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Fabrication and Packaging of Electromagnetic 2D MEMS Scanning Mirror

    Contributors:

    Zhang, C. (author) / Tang, F.

    Published in:

    MICRO-NANO TECHNOLOGY XV ; 1165-1169

    KEY ENGINEERING MATERIALS ; 609/610

    Publication date:

    2014-01-01

    Size:

    5 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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