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    Monitoring of (reactive) ion etching (RIE) with reflectance anisotropy spectroscopy (RAS) equipment

    New search for: Barzen, L.
    New search for: Richter, J.
    New search for: Fouckhardt, H.
    New search for: Wahl, M.
    New search for: Kopnarski, M.

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    Monitoring of (reactive) ion etching (RIE) with reflectance anisotropy spectroscopy (RAS) equipment

    New search for: Barzen, L.
    New search for: Richter, J.
    New search for: Fouckhardt, H.
    New search for: Wahl, M.
    New search for: Kopnarski, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Monitoring of (reactive) ion etching (RIE) with reflectance anisotropy spectroscopy (RAS) equipment

    New search for: Barzen, L.
    New search for: Richter, J.
    New search for: Fouckhardt, H.
    New search for: Wahl, M.
    New search for: Kopnarski, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Monitoring of (reactive) ion etching (RIE) with reflectance anisotropy spectroscopy (RAS) equipment

    Contributors:

    Barzen, L. (author) / Richter, J. (author) / Fouckhardt, H. (author) / Wahl, M. (author) / Kopnarski, M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 328 ; 120-124

    Publication date:

    2015-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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