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    Etching process of silicon oxycarbide from polysiloxane by chlorine

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    Etching process of silicon oxycarbide from polysiloxane by chlorine

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    Etching process of silicon oxycarbide from polysiloxane by chlorine

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    Title:

    Etching process of silicon oxycarbide from polysiloxane by chlorine

    Published in:

    CORROSION SCIENCE ; 94 ; 237-244

    Publication date:

    2015-01-01

    Size:

    8 pages

    ISSN:

    0010-938X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.16205 / 620

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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