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PECVD synthesis, optical and mechanical properties of silicon carbon nitride films

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Document information

Title:

PECVD synthesis, optical and mechanical properties of silicon carbon nitride films

Published in:

APPLIED SURFACE SCIENCE ; 339 ; 102-108

Publication date:

2015-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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