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    Neural network modeling of PECVD silicon nitride films

    New search for: Ghosh, S.
    New search for: Dutta, P.K.
    New search for: Bose, D.N.

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    Neural network modeling of PECVD silicon nitride films

    New search for: Ghosh, S.
    New search for: Dutta, P.K.
    New search for: Bose, D.N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Neural network modeling of PECVD silicon nitride films

    New search for: Ghosh, S.
    New search for: Dutta, P.K.
    New search for: Bose, D.N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Neural network modeling of PECVD silicon nitride films

    Contributors:

    Ghosh, S. (author) / Dutta, P.K. (author) / Bose, D.N. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 2 ; 1-11

    Publication date:

    1999-01-01

    Size:

    11 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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