Laser-induced damage of Ta2O5 films obtained from TaCl5 precursor and annealed at different temperatures: Fid-Bau Portal

Laser-induced damage of Ta2O5 films obtained from TaCl5 precursor and annealed at different temperatures

Xu, C. / Li, D. / Fan, H. / Qi, J. / Deng, J. / Yang, S. / Yi, P. / Qiang, Y.

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Laser-induced damage of Ta2O5 films obtained from TaCl5 precursor and annealed at different temperatures

Xu, C. / Li, D. / Fan, H. / Qi, J. / Deng, J. / Yang, S. / Yi, P. / Qiang, Y.

Laser-induced damage of Ta2O5 films obtained from TaCl5 precursor and annealed at different temperatures

Xu, C. / Li, D. / Fan, H. / Qi, J. / Deng, J. / Yang, S. / Yi, P. / Qiang, Y.

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Check availability in my library

Order at Subito €

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Document information

Title:

Laser-induced damage of Ta2O5 films obtained from TaCl5 precursor and annealed at different temperatures

Contributors:

Xu, C. (author) / Li, D. (author) / Fan, H. (author) / Qi, J. (author) / Deng, J. (author) / Yang, S. (author) / Yi, P. (author) / Qiang, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 344 ; 137-145

Publication date:

2015-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Xu, C. / Yi, P. / Fan, H. et al. | British Library Online Contents | 2014

On the mechanism of chemical vapor deposition of Ta2O5 from TaCl5 and H2O. An ab initio study of gas phase reactions

Siodmiak, M. / Frenking, G. / Korkin, A. | British Library Online Contents | 2000

Laser-induced damage of Ta2O5/SiO2 narrow-band interference filters under different 1064nm Nd:YAG laser modes

Gao, W. / Zhan, M. / Fan, S. et al. | British Library Online Contents | 2005

High temperature annealing effect on structure, optical property and laser-induced damage threshold of Ta2O5 films

Xu, C. / Xiao, Q. / Ma, J. et al. | British Library Online Contents | 2008

The investigation of carbon nitride films annealed at different temperatures

Zhou, Z. / Xia, L. / Sun, M. | British Library Online Contents | 2003