Experimental study of hydrogen plasma etching of (100) single crystal diamond in a MPACVD reactor: Fid-Bau Portal

Experimental study of hydrogen plasma etching of (100) single crystal diamond in a MPACVD reactor

Ivanov, O. A. / Muchnikov, A. B. / Chernov, V. V. / Bogdanov, S. A. / Vikharev, A. L. / Butler, J. E.

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Experimental study of hydrogen plasma etching of (100) single crystal diamond in a MPACVD reactor

Ivanov, O. A. / Muchnikov, A. B. / Chernov, V. V. / Bogdanov, S. A. / Vikharev, A. L. / Butler, J. E.

Experimental study of hydrogen plasma etching of (100) single crystal diamond in a MPACVD reactor

Ivanov, O. A. / Muchnikov, A. B. / Chernov, V. V. / Bogdanov, S. A. / Vikharev, A. L. / Butler, J. E.

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Document information

Title:

Experimental study of hydrogen plasma etching of (100) single crystal diamond in a MPACVD reactor

Contributors:

Ivanov, O. A. (author) / Muchnikov, A. B. (author) / Chernov, V. V. (author) / Bogdanov, S. A. (author) / Vikharev, A. L. (author) / Butler, J. E. (author)

Published in:

MATERIALS LETTERS ; 151 ; 115-118

Publication date:

2015-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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