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    Photoelectron spectroscopy as an in situ contact-less method for studies of MOS properties of ultrathin oxides on Si

    New search for: Silva, A. G.
    New search for: Pedersen, K.
    New search for: Li, Z. S.
    New search for: Morgen, P.

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    Photoelectron spectroscopy as an in situ contact-less method for studies of MOS properties of ultrathin oxides on Si

    New search for: Silva, A. G.
    New search for: Pedersen, K.
    New search for: Li, Z. S.
    New search for: Morgen, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Photoelectron spectroscopy as an in situ contact-less method for studies of MOS properties of ultrathin oxides on Si

    New search for: Silva, A. G.
    New search for: Pedersen, K.
    New search for: Li, Z. S.
    New search for: Morgen, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Photoelectron spectroscopy as an in situ contact-less method for studies of MOS properties of ultrathin oxides on Si

    Contributors:

    Silva, A. G. (author) / Pedersen, K. (author) / Li, Z. S. (author) / Morgen, P. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 353 ; 1208-1213

    Publication date:

    2015-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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