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Effects of the amount of Si rings on the phase separation and crystallization of silicon-rich SiO2 thin films
Effects of the amount of Si rings on the phase separation and crystallization of silicon-rich SiO2 thin films
Effects of the amount of Si rings on the phase separation and crystallization of silicon-rich SiO2 thin films
APPLIED SURFACE SCIENCE ; 349 ; 839-843
2015-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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