Influence of ion bombardment on structure and properties of TiZrN thin film: Fid-Bau Portal

Influence of ion bombardment on structure and properties of TiZrN thin film

Lin, Y. W. / Huang, J. H. / Yu, G. P. / Hsiao, C. N. / Chen, F. Z.

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Influence of ion bombardment on structure and properties of TiZrN thin film

Lin, Y. W. / Huang, J. H. / Yu, G. P. / Hsiao, C. N. / Chen, F. Z.

Influence of ion bombardment on structure and properties of TiZrN thin film

Lin, Y. W. / Huang, J. H. / Yu, G. P. / Hsiao, C. N. / Chen, F. Z.

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Check availability in my library

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Document information

Title:

Influence of ion bombardment on structure and properties of TiZrN thin film

Contributors:

Lin, Y. W. (author) / Huang, J. H. (author) / Yu, G. P. (author) / Hsiao, C. N. (author) / Chen, F. Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 354 ; 155-160

Publication date:

2015-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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