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Growth of (111)-oriented epitaxial magnesium silicide (Mg2Si) films on (001) Al2O3 substrates by RF magnetron sputtering and their properties
Growth of (111)-oriented epitaxial magnesium silicide (Mg2Si) films on (001) Al2O3 substrates by RF magnetron sputtering and their properties
Growth of (111)-oriented epitaxial magnesium silicide (Mg2Si) films on (001) Al2O3 substrates by RF magnetron sputtering and their properties
Katagiri, A. (author) / Ogawa, S. (author) / Uehara, M. (author) / Sankara Rama Krishnan, P. S. (author) / Kurokawa, M. (author) / Matsushima, M. (author) / Shimizu, T. (author) / Akiyama, K. (author) / Funakubo, H. (author)
JOURNAL OF MATERIALS SCIENCE ; 53 ; 5151-5158
2018-01-01
8 pages
Article (Journal)
English
DDC:
620.11
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