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Process Optimization of Lapping Sapphire Substrate with Fixed Diamond Abrasive Pad

Wang, J. B. / Li, Z. / Gao, H. / Shu, D. / Xiao, P.

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Process Optimization of Lapping Sapphire Substrate with Fixed Diamond Abrasive Pad

Wang, J. B. / Li, Z. / Gao, H. / Shu, D. / Xiao, P.

Process Optimization of Lapping Sapphire Substrate with Fixed Diamond Abrasive Pad

Wang, J. B. / Li, Z. / Gao, H. / Shu, D. / Xiao, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Process Optimization of Lapping Sapphire Substrate with Fixed Diamond Abrasive Pad

Contributors:

Wang, J. B. (author) / Li, Z. (author) / Gao, H. (author) / Shu, D. (author) / Xiao, P. (author)

Published in:

Key engineering materials ; 693 ; 1090-1097

Publication date:

2016-01-01

Size:

8 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105

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