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Activation and deactivation of phosphorus in silicon-on-insulator substrates
Activation and deactivation of phosphorus in silicon-on-insulator substrates
Activation and deactivation of phosphorus in silicon-on-insulator substrates
Chang, Ruey-Dar (author) / Lin, Chih-Hung (author)
Materials science in semiconductor processing ; 42 ; 219-222
2016-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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