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Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Activation and deactivation of phosphorus in silicon-on-insulator substrates
Activation and deactivation of phosphorus in silicon-on-insulator substrates
Activation and deactivation of phosphorus in silicon-on-insulator substrates
Chang, Ruey-Dar (Autor:in) / Lin, Chih-Hung (Autor:in)
Materials science in semiconductor processing ; 42 ; 219-222
01.01.2016
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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