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Density functional theory calculations for estimation of gettering sites of C, H, intrinsic point defects and related complexes in Si wafers
Density functional theory calculations for estimation of gettering sites of C, H, intrinsic point defects and related complexes in Si wafers
Density functional theory calculations for estimation of gettering sites of C, H, intrinsic point defects and related complexes in Si wafers
Shirasawa, Sho (author) / Sueoka, Koji (author) / Yamaguchi, Tadashi (author) / Maekawa, Kazuyoshi (author)
Materials science in semiconductor processing ; 44 ; 13-17
2016-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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