Gettering in silicon-on-insulator wafers with polysilicon layer

Savin, H. / Yli-Koski, M. / Haarahiltunen, A. et al. | British Library Online Contents | 2009

Influence of extended defects and native impurities on external gettering in polycrystalline silicon

Ehret, E. / Allais, V. / Vallard, J.-P. et al. | British Library Online Contents | 1995

Efficiency of cavity gettering in single and in multicrystalline silicon wafers

Martinuzzi, S. / Henquinet, N.G. / Perichaud, I. et al. | British Library Online Contents | 2000

Influence of Oxygen on External Phosphorus Gettering in Disordered Silicon Wafers

Martinuzzi, S. / Perichaud, I. | British Library Online Contents | 1993

Density functional theory calculations for estimation of gettering sites of C, H, intrinsic point defects and related complexes in Si wafers

Shirasawa, Sho / Sueoka, Koji / Yamaguchi, Tadashi et al. | British Library Online Contents | 2016