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    Pattern transfer of microstructures between deeply etched surface for MEMS applications

    New search for: Joyce, Robin
    New search for: Yadav, Supriya
    New search for: Sharma, Akash Kumar
    New search for: Panwar, Deepak Kumar
    New search for: Bhatia, Ravi Raj
    New search for: Varghese, Soney
    New search for: Akhtar, Jamil

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    Pattern transfer of microstructures between deeply etched surface for MEMS applications

    New search for: Joyce, Robin
    New search for: Yadav, Supriya
    New search for: Sharma, Akash Kumar
    New search for: Panwar, Deepak Kumar
    New search for: Bhatia, Ravi Raj
    New search for: Varghese, Soney
    New search for: Akhtar, Jamil

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Pattern transfer of microstructures between deeply etched surface for MEMS applications

    New search for: Joyce, Robin
    New search for: Yadav, Supriya
    New search for: Sharma, Akash Kumar
    New search for: Panwar, Deepak Kumar
    New search for: Bhatia, Ravi Raj
    New search for: Varghese, Soney
    New search for: Akhtar, Jamil

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Pattern transfer of microstructures between deeply etched surface for MEMS applications

    Contributors:

    Joyce, Robin (author) / Yadav, Supriya (author) / Sharma, Akash Kumar (author) / Panwar, Deepak Kumar (author) / Bhatia, Ravi Raj (author) / Varghese, Soney (author) / Akhtar, Jamil (author)

    Published in:

    Materials science in semiconductor processing ; 56 ; 373-380

    Publication date:

    2016-01-01

    Size:

    8 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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