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    MEMS-based microstructures for nanomechanical characterization of thin films

    New search for: Boe, A.
    New search for: Safi, A.
    New search for: Coulombier, M.
    New search for: Fabregue, D.
    New search for: Pardoen, T.
    New search for: Raskin, J.-P.

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    MEMS-based microstructures for nanomechanical characterization of thin films

    New search for: Boe, A.
    New search for: Safi, A.
    New search for: Coulombier, M.
    New search for: Fabregue, D.
    New search for: Pardoen, T.
    New search for: Raskin, J.-P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    MEMS-based microstructures for nanomechanical characterization of thin films

    New search for: Boe, A.
    New search for: Safi, A.
    New search for: Coulombier, M.
    New search for: Fabregue, D.
    New search for: Pardoen, T.
    New search for: Raskin, J.-P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    MEMS-based microstructures for nanomechanical characterization of thin films

    Contributors:

    Boe, A. (author) / Safi, A. (author) / Coulombier, M. (author) / Fabregue, D. (author) / Pardoen, T. (author) / Raskin, J.-P. (author)

    Published in:

    SMART MATERIALS AND STRUCTURES ; 18 ; 115018

    Publication date:

    2009-01-01

    Size:

    115018 pages

    ISSN:

    0964-1726

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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