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    Formation and characterization of porous silicon films obtained by catalyzed vapor-chemical etching

    New search for: Díaz-Torres, E.
    New search for: Romero-Paredes, G.
    New search for: Peña-Sierra, R.
    New search for: Ávila-García, A.

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    Formation and characterization of porous silicon films obtained by catalyzed vapor-chemical etching

    New search for: Díaz-Torres, E.
    New search for: Romero-Paredes, G.
    New search for: Peña-Sierra, R.
    New search for: Ávila-García, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Formation and characterization of porous silicon films obtained by catalyzed vapor-chemical etching

    New search for: Díaz-Torres, E.
    New search for: Romero-Paredes, G.
    New search for: Peña-Sierra, R.
    New search for: Ávila-García, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Formation and characterization of porous silicon films obtained by catalyzed vapor-chemical etching

    Contributors:

    Díaz-Torres, E. (author) / Romero-Paredes, G. (author) / Peña-Sierra, R. (author) / Ávila-García, A. (author)

    Published in:

    Materials science in semiconductor processing ; 40 ; 533-538

    Publication date:

    2015-01-01

    Size:

    6 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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