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    Role of thermal annealing on SiGe thin films fabricated by PECVD

    New search for: Joseph, Sudha
    New search for: Saraf, Nileshi
    New search for: Umamaheswara, Adithi
    New search for: Bhat, Navakanta

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    Role of thermal annealing on SiGe thin films fabricated by PECVD

    New search for: Joseph, Sudha
    New search for: Saraf, Nileshi
    New search for: Umamaheswara, Adithi
    New search for: Bhat, Navakanta

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Role of thermal annealing on SiGe thin films fabricated by PECVD

    New search for: Joseph, Sudha
    New search for: Saraf, Nileshi
    New search for: Umamaheswara, Adithi
    New search for: Bhat, Navakanta

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Role of thermal annealing on SiGe thin films fabricated by PECVD

    Contributors:

    Joseph, Sudha (author) / Saraf, Nileshi (author) / Umamaheswara, Adithi (author) / Madakasira, Vijayaraghavan (author) / Bhat, Navakanta (author)

    Published in:

    Materials science in semiconductor processing ; 40 ; 655-663

    Publication date:

    2015-01-01

    Size:

    9 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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