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Mixed phase silicon thin films grown at high rate using 60MHz assisted VHF-PECVD technique
Mixed phase silicon thin films grown at high rate using 60MHz assisted VHF-PECVD technique
Mixed phase silicon thin films grown at high rate using 60MHz assisted VHF-PECVD technique
Juneja, Sucheta (author) / Sudhakar, S. (author) / Gope, Jhuma (author) / Kumar, Sushil (author)
Materials science in semiconductor processing ; 40 ; 11-19
2015-01-01
9 pages
Article (Journal)
English
DDC:
621.38152
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