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    beta-SiC Thin Films Grown by PECVD at Low Temperature

    New search for: Wei, L.
    New search for: Mei, W.
    New search for: Hao, W.

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    beta-SiC Thin Films Grown by PECVD at Low Temperature

    New search for: Wei, L.
    New search for: Mei, W.
    New search for: Hao, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    beta-SiC Thin Films Grown by PECVD at Low Temperature

    New search for: Wei, L.
    New search for: Mei, W.
    New search for: Hao, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    beta-SiC Thin Films Grown by PECVD at Low Temperature

    Contributors:

    Wei, L. (author) / Mei, W. (author) / Hao, W. (author)

    Published in:

    RARE METAL MATERIALS AND ENGINEERING ; 30 ; 479-481

    Publication date:

    2001-01-01

    Size:

    3 pages

    ISSN:

    1002-185X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  669

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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