Xenon implantation effects on the structural and optical properties of reactively sputtered titanium nitride thin films: Fid-Bau Portal

Xenon implantation effects on the structural and optical properties of reactively sputtered titanium nitride thin films

Popović, M. / Novaković, M. / Mitrić, M. / Zhang, K. / Rakočević, Z. / Bibić, N.

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Xenon implantation effects on the structural and optical properties of reactively sputtered titanium nitride thin films

Popović, M. / Novaković, M. / Mitrić, M. / Zhang, K. / Rakočević, Z. / Bibić, N.

Xenon implantation effects on the structural and optical properties of reactively sputtered titanium nitride thin films

Popović, M. / Novaković, M. / Mitrić, M. / Zhang, K. / Rakočević, Z. / Bibić, N.

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Document information

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Document information

Title:

Xenon implantation effects on the structural and optical properties of reactively sputtered titanium nitride thin films

Contributors:

Popović, M. (author) / Novaković, M. (author) / Mitrić, M. (author) / Zhang, K. (author) / Rakočević, Z. (author) / Bibić, N. (author)

Published in:

Materials research bulletin ; 91 ; 36-41

Publication date:

2017-01-01

Size:

6 pages

ISSN:

0025-5408

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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