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Reactively sputtered WO~xN~y films

Shen, Y. G. / Mai, Y. W.

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Reactively sputtered WO~xN~y films

Shen, Y. G. / Mai, Y. W.

Reactively sputtered WO~xN~y films

Shen, Y. G. / Mai, Y. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Reactively sputtered WO~xN~y films

Contributors:

Shen, Y. G. (author) / Mai, Y. W. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 15 ; 2437-2445

Publication date:

2000-01-01

Size:

9 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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