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    Investigation of the AZ 5214E photoresist by the laser interference, EBDW and NSOM lithographies

    New search for: Škriniarová, J.
    New search for: Pudiš, D.
    New search for: Andok, R.
    New search for: Lettrichová, I.
    New search for: Uherek, F.

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    Investigation of the AZ 5214E photoresist by the laser interference, EBDW and NSOM lithographies

    New search for: Škriniarová, J.
    New search for: Pudiš, D.
    New search for: Andok, R.
    New search for: Lettrichová, I.
    New search for: Uherek, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Investigation of the AZ 5214E photoresist by the laser interference, EBDW and NSOM lithographies

    New search for: Škriniarová, J.
    New search for: Pudiš, D.
    New search for: Andok, R.
    New search for: Lettrichová, I.
    New search for: Uherek, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Investigation of the AZ 5214E photoresist by the laser interference, EBDW and NSOM lithographies

    Contributors:

    Škriniarová, J. (author) / Pudiš, D. (author) / Andok, R. (author) / Lettrichová, I. (author) / Uherek, F. (author)

    Published in:

    Applied surface science ; 395 ; 226-231

    Publication date:

    2017-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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