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    Effect of working pressure and annealing temperature on single-phase AlN films

    New search for: Lan, Yunping
    New search for: Shi, Yunbo

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    Effect of working pressure and annealing temperature on single-phase AlN films

    New search for: Lan, Yunping
    New search for: Shi, Yunbo

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of working pressure and annealing temperature on single-phase AlN films

    New search for: Lan, Yunping
    New search for: Shi, Yunbo

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Effect of working pressure and annealing temperature on single-phase AlN films

    Contributors:

    Lan, Yunping (author) / Shi, Yunbo (author)

    Published in:

    MATERIALS LETTERS ; 213 ; 1-3

    Publication date:

    2018-01-01

    Size:

    3 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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