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Effect of working pressure and annealing temperature on single-phase AlN films
Effect of working pressure and annealing temperature on single-phase AlN films
Effect of working pressure and annealing temperature on single-phase AlN films
Lan, Yunping (Autor:in) / Shi, Yunbo (Autor:in)
MATERIALS LETTERS ; 213 ; 1-3
01.01.2018
3 pages
Aufsatz (Zeitschrift)
Unbekannt
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Effect of working pressure and annealing temperature on single-phase AlN films
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