Plasma enhanced growth, composition and refractive index of silicon oxynitride films: Fid-Bau Portal

Plasma enhanced growth, composition and refractive index of silicon oxynitride films

Bose, M. / Bose, D. N. / Basa, D. K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Plasma enhanced growth, composition and refractive index of silicon oxynitride films

Bose, M. / Bose, D. N. / Basa, D. K.

Plasma enhanced growth, composition and refractive index of silicon oxynitride films

Bose, M. / Bose, D. N. / Basa, D. K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Plasma enhanced growth, composition and refractive index of silicon oxynitride films

Contributors:

Bose, M. (author) / Bose, D. N. (author) / Basa, D. K. (author)

Published in:

MATERIALS LETTERS ; 52 ; 417-422

Publication date:

2002-01-01

Size:

6 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

Machorro, R. / Samano, E. C. / Soto, G. et al. | British Library Online Contents | 2000

Effect of film chemistry on refractive index of plasma-enhanced chemical vapor deposited silicon oxynitride films: A correlative study

Naskar, S. / Wolter, S.D. / Bower, C.A. et al. | British Library Online Contents | 2008

Deuterium diffusion into plasma-deposited silicon oxynitride films

Arnoldbik, W. M. / Maree, C. H. M. / Habraken, F. H. P. M. | British Library Online Contents | 1994

Physical and Electrical Properties of Silicon Nitride and Oxynitride Films Prepared by Plasma Enhanced CVD

Vuillod, J. | British Library Online Contents | 1993

Effective refractive index and composition of oxidized porous silicon films

Astrova, E.V. / Tolmachev, V.A. | British Library Online Contents | 2000