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Enhanced tunability of the composition in silicon oxynitride thin films by the reactive gas pulsing process

Aubry, E. / Weber, S. / Billard, A. / Martin, N.

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Enhanced tunability of the composition in silicon oxynitride thin films by the reactive gas pulsing process

Aubry, E. / Weber, S. / Billard, A. / Martin, N.

Enhanced tunability of the composition in silicon oxynitride thin films by the reactive gas pulsing process

Aubry, E. / Weber, S. / Billard, A. / Martin, N.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Enhanced tunability of the composition in silicon oxynitride thin films by the reactive gas pulsing process

Contributors:

Aubry, E. (author) / Weber, S. (author) / Billard, A. (author) / Martin, N. (author)

Published in:

APPLIED SURFACE SCIENCE ; 290 ; 148-153

Publication date:

2014-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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