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Optimization of nanometer bulk junctionless Trigate FET using gate and isolation dielectric engineering
Optimization of nanometer bulk junctionless Trigate FET using gate and isolation dielectric engineering
Optimization of nanometer bulk junctionless Trigate FET using gate and isolation dielectric engineering
Scarlet, S. Priscilla (author) / Srinivasan, R. (author)
Materials science in semiconductor processing ; 84 ; 107-114
2018-01-01
8 pages
Article (Journal)
English
DDC:
621.38152
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