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Surface engineering of SiC via sublimation etching
Surface engineering of SiC via sublimation etching
Surface engineering of SiC via sublimation etching
Jokubavicius, Valdas (author) / Yazdi, Gholam R. (author) / Ivanov, Ivan G. (author) / Niu, Yuran (author) / Zakharov, Alexei (author) / Iakimov, Tihomir (author) / Syväjärvi, Mikael (author) / Yakimova, Rositsa (author)
Applied surface science ; 390 ; 816-822
2016-01-01
7 pages
Article (Journal)
English
DDC:
620.44
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