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Surface engineering of SiC via sublimation etching

Jokubavicius, V. / Yazdi, G. R. / Ivanov, I. G. / Niu, Y. / Zakharov, A. / Iakimov, T. / Syväjärvi, M. / Yakimova, R.

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Surface engineering of SiC via sublimation etching

Jokubavicius, V. / Yazdi, G. R. / Ivanov, I. G. / Niu, Y. / Zakharov, A. / Iakimov, T. / Syväjärvi, M. / Yakimova, R.

Surface engineering of SiC via sublimation etching

Jokubavicius, V. / Yazdi, G. R. / Ivanov, I. G. / Niu, Y. / Zakharov, A. / Iakimov, T. / Syväjärvi, M. / Yakimova, R.

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Document information

Title:

Surface engineering of SiC via sublimation etching

Contributors:

Jokubavicius, V. (author) / Yazdi, G. R. (author) / Ivanov, I. G. (author) / Niu, Y. (author) / Zakharov, A. (author) / Iakimov, T. (author) / Syväjärvi, M. (author) / Yakimova, R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 390 ; 816-822

Publication date:

2016-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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