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SiC HTCVD Simulation Modified by Sublimation Etching

Kitou, Y. / Makino, E. / Ikeda, K. / Nagakubo, M. / Onda, S.

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SiC HTCVD Simulation Modified by Sublimation Etching

Kitou, Y. / Makino, E. / Ikeda, K. / Nagakubo, M. / Onda, S.

SiC HTCVD Simulation Modified by Sublimation Etching

Kitou, Y. / Makino, E. / Ikeda, K. / Nagakubo, M. / Onda, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

SiC HTCVD Simulation Modified by Sublimation Etching

Contributors:

Kitou, Y. (author) / Makino, E. (author) / Ikeda, K. (author) / Nagakubo, M. (author) / Onda, S. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.

Published in:

Silicon Carbide and Related Materials - 2005 ; 107-110

MATERIALS SCIENCE FORUM ; 527/529

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ellison, A. / Magnusson, B. / Son, N. T. et al. | British Library Online Contents | 2003

SiC Crystal Growth by HTCVD

Ellison, A. / Magnusson, B. / Sundqvist, B. et al. | British Library Online Contents | 2004

Observation of Vacancy Clusters in HTCVD Grown SiC

Aavikko, R. / Saarinen, K. / Magnusson, B. et al. | British Library Online Contents | 2005

Computational Analysis of SiC HTCVD from Silicon Tetrachloride and Propane

Makarov, Y.N. / Talalaev, R.A. / Vorob ev, A.N. et al. | British Library Online Contents | 2009

Growth of High Quality p-Type 4H-SiC Substrates by HTCVD

Sundqvist, B. / Ellison, A. / Jonsson, A. et al. | British Library Online Contents | 2003