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A platform for research: civil engineering, architecture and urbanism
Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography
Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography
Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography
Xue, Chaofan (author) / Zhao, Jun (author) / Wu, Yanqing (author) / Yu, Huaina (author) / Yang, Shumin (author) / Wang, Liansheng (author) / Zhao, Wencong (author) / Wu, Qiang (author) / Zhu, Zhichao (author) / Liu, Bo (author)
Applied surface science ; 425 ; 553-557
2017-01-01
5 pages
Article (Journal)
English
DDC:
620.44
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