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    Electrical properties of epitaxial Lu- or Y-doped La2O3/La2O3/Ge high-k gate-stacks

    New search for: Kanashima, T.
    New search for: Yamashiro, R.
    New search for: Zenitaka, M.
    New search for: Yamamoto, K.
    New search for: Wang, D.
    New search for: Tadano, J.
    New search for: Yamada, S.
    New search for: Nohira, H.
    New search for: Nakashima, H.
    New search for: Hamaya, K.

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    Electrical properties of epitaxial Lu- or Y-doped La2O3/La2O3/Ge high-k gate-stacks

    New search for: Kanashima, T.
    New search for: Yamashiro, R.
    New search for: Zenitaka, M.
    New search for: Yamamoto, K.
    New search for: Wang, D.
    New search for: Tadano, J.
    New search for: Yamada, S.
    New search for: Nohira, H.
    New search for: Nakashima, H.
    New search for: Hamaya, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electrical properties of epitaxial Lu- or Y-doped La2O3/La2O3/Ge high-k gate-stacks

    New search for: Kanashima, T.
    New search for: Yamashiro, R.
    New search for: Zenitaka, M.
    New search for: Yamamoto, K.
    New search for: Wang, D.
    New search for: Tadano, J.
    New search for: Yamada, S.
    New search for: Nohira, H.
    New search for: Nakashima, H.
    New search for: Hamaya, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Electrical properties of epitaxial Lu- or Y-doped La2O3/La2O3/Ge high-k gate-stacks

    Contributors:

    Kanashima, T. (author) / Yamashiro, R. (author) / Zenitaka, M. (author) / Yamamoto, K. (author) / Wang, D. (author) / Tadano, J. (author) / Yamada, S. (author) / Nohira, H. (author) / Nakashima, H. (author) / Hamaya, K. (author)

    Published in:

    Materials science in semiconductor processing ; 70 ; 260-264

    Publication date:

    2017-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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