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CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media
CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media
CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media
Szívós, János (author) / Pothorszky, Szilárd (author) / Soltys, Jan (author) / Serényi, Miklós (author) / An, Hongyu (author) / Gao, Tenghua (author) / Deák, András (author) / Shi, Ji (author) / Sáfrán, György (author)
Applied surface science ; 435 ; 31-38
2018-01-01
8 pages
Article (Journal)
English
DDC:
620.44
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