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Investigation of H2/CH4 mixed gas plasma post-etching process for ZnO:B front contacts grown by LP-MOCVD method in silicon-based thin-film solar cells
Investigation of H2/CH4 mixed gas plasma post-etching process for ZnO:B front contacts grown by LP-MOCVD method in silicon-based thin-film solar cells
Investigation of H2/CH4 mixed gas plasma post-etching process for ZnO:B front contacts grown by LP-MOCVD method in silicon-based thin-film solar cells
Wang, Li (author) / Zhang, Xiaodan (author) / Zhao, Ying (author) / Yamada, Takuto (author) / Naito, Yusuke (author)
Applied surface science ; 316 ; 508-514
2014-01-01
7 pages
Article (Journal)
English
DDC:
620.44
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