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    Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate

    New search for: Stan, G.E.
    New search for: Botea, M.
    New search for: Boni, G.A.
    New search for: Pintilie, I.
    New search for: Pintilie, L.

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    Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate

    New search for: Stan, G.E.
    New search for: Botea, M.
    New search for: Boni, G.A.
    New search for: Pintilie, I.
    New search for: Pintilie, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate

    New search for: Stan, G.E.
    New search for: Botea, M.
    New search for: Boni, G.A.
    New search for: Pintilie, I.
    New search for: Pintilie, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate

    Contributors:

    Stan, G.E. (author) / Botea, M. (author) / Boni, G.A. (author) / Pintilie, I. (author) / Pintilie, L. (author)

    Published in:

    Applied surface science ; 353 ; 1195-1202

    Publication date:

    2015-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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