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    Study of hafnium oxide thin films deposited by RF magnetron sputtering under glancing angle deposition at varying target to substrate distance

    New search for: Haque, S. Maidul
    New search for: Rao, K. Divakar
    New search for: Misal, J.S.
    New search for: Tokas, R.B.
    New search for: Shinde, D.D.
    New search for: Ramana, J.V.
    New search for: Rai, Sanjay
    New search for: Sahoo, N.K.

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    Study of hafnium oxide thin films deposited by RF magnetron sputtering under glancing angle deposition at varying target to substrate distance

    New search for: Haque, S. Maidul
    New search for: Rao, K. Divakar
    New search for: Misal, J.S.
    New search for: Tokas, R.B.
    New search for: Shinde, D.D.
    New search for: Ramana, J.V.
    New search for: Rai, Sanjay
    New search for: Sahoo, N.K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study of hafnium oxide thin films deposited by RF magnetron sputtering under glancing angle deposition at varying target to substrate distance

    New search for: Haque, S. Maidul
    New search for: Rao, K. Divakar
    New search for: Misal, J.S.
    New search for: Tokas, R.B.
    New search for: Shinde, D.D.
    New search for: Ramana, J.V.
    New search for: Rai, Sanjay
    New search for: Sahoo, N.K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Study of hafnium oxide thin films deposited by RF magnetron sputtering under glancing angle deposition at varying target to substrate distance

    Contributors:

    Haque, S. Maidul (author) / Rao, K. Divakar (author) / Misal, J.S. (author) / Tokas, R.B. (author) / Shinde, D.D. (author) / Ramana, J.V. (author) / Rai, Sanjay (author) / Sahoo, N.K. (author)

    Published in:

    Applied surface science ; 353 ; 459-468

    Publication date:

    2015-01-01

    Size:

    10 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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