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    The Effect of Target to Substrate Distance on the Properties of HAZO Films Deposited by Magnetron Sputtering

    New search for: Lu, W.M.
    New search for: Zhang, J.
    New search for: Diao, H.W.
    New search for: Zhao, L.
    New search for: Wang, W.J.
    New search for: Gao, K.
    New search for: Zhou, S.
    New search for: Zhao, X.

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    The Effect of Target to Substrate Distance on the Properties of HAZO Films Deposited by Magnetron Sputtering

    New search for: Lu, W.M.
    New search for: Zhang, J.
    New search for: Diao, H.W.
    New search for: Zhao, L.
    New search for: Wang, W.J.
    New search for: Gao, K.
    New search for: Zhou, S.
    New search for: Zhao, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The Effect of Target to Substrate Distance on the Properties of HAZO Films Deposited by Magnetron Sputtering

    New search for: Lu, W.M.
    New search for: Zhang, J.
    New search for: Diao, H.W.
    New search for: Zhao, L.
    New search for: Wang, W.J.
    New search for: Gao, K.
    New search for: Zhou, S.
    New search for: Zhao, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    The Effect of Target to Substrate Distance on the Properties of HAZO Films Deposited by Magnetron Sputtering

    Contributors:

    Lu, W.M. (author) / Zhang, J. (author) / Diao, H.W. (author) / Zhao, L. (author) / Wang, W.J. (author) / Gao, K. / Zhou, S. / Zhao, X.

    Published in:

    Energy, Environment and Biological Materials ; 134-140

    MATERIALS SCIENCE FORUM ; 685

    Publication date:

    2011-01-01

    Size:

    7 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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