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Depth resolution and preferential sputtering in depth profiling of delta layers

Hofmann, S. / Lian, S.Y. / Han, Y.S. / Liu, Y. / Wang, J.Y.

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Depth resolution and preferential sputtering in depth profiling of delta layers

Hofmann, S. / Lian, S.Y. / Han, Y.S. / Liu, Y. / Wang, J.Y.

Depth resolution and preferential sputtering in depth profiling of delta layers

Hofmann, S. / Lian, S.Y. / Han, Y.S. / Liu, Y. / Wang, J.Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Depth resolution and preferential sputtering in depth profiling of delta layers

Contributors:

Hofmann, S. (author) / Lian, S.Y. (author) / Han, Y.S. (author) / Liu, Y. (author) / Wang, J.Y. (author)

Published in:

Applied surface science ; 455 ; 1045-1056

Publication date:

2018-01-01

Size:

12 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

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