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Accuracy of calibrated depth by delta-doped reference materials in shallow depth profiling

Tomita, M. / Tanaka, H. / Koike, M. / Kinno, T. / Hori, Y. / Yoshida, N. / Sasaki, T. / Takeno, S.

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Accuracy of calibrated depth by delta-doped reference materials in shallow depth profiling

Tomita, M. / Tanaka, H. / Koike, M. / Kinno, T. / Hori, Y. / Yoshida, N. / Sasaki, T. / Takeno, S.

Accuracy of calibrated depth by delta-doped reference materials in shallow depth profiling

Tomita, M. / Tanaka, H. / Koike, M. / Kinno, T. / Hori, Y. / Yoshida, N. / Sasaki, T. / Takeno, S.

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Document information

Title:

Accuracy of calibrated depth by delta-doped reference materials in shallow depth profiling

Contributors:

Tomita, M. (author) / Tanaka, H. (author) / Koike, M. (author) / Kinno, T. (author) / Hori, Y. (author) / Yoshida, N. (author) / Sasaki, T. (author) / Takeno, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 1311-1315

Publication date:

2008-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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