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    Self-focusing SIMS: A metrology solution to area selective deposition

    New search for: Spampinato, Valentina
    New search for: Armini, Silvia
    New search for: Franquet, Alexis
    New search for: Conard, Thierry
    New search for: van der Heide, Paul
    New search for: Vandervorst, Wilfried

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    Self-focusing SIMS: A metrology solution to area selective deposition

    New search for: Spampinato, Valentina
    New search for: Armini, Silvia
    New search for: Franquet, Alexis
    New search for: Conard, Thierry
    New search for: van der Heide, Paul
    New search for: Vandervorst, Wilfried

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Self-focusing SIMS: A metrology solution to area selective deposition

    New search for: Spampinato, Valentina
    New search for: Armini, Silvia
    New search for: Franquet, Alexis
    New search for: Conard, Thierry
    New search for: van der Heide, Paul
    New search for: Vandervorst, Wilfried

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Self-focusing SIMS: A metrology solution to area selective deposition

    Contributors:

    Spampinato, Valentina (author) / Armini, Silvia (author) / Franquet, Alexis (author) / Conard, Thierry (author) / van der Heide, Paul (author) / Vandervorst, Wilfried (author)

    Published in:

    Applied surface science ; 476 ; 594-599

    Publication date:

    2019-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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