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    Self Focusing SIMS: Probing thin film composition in very confined volumes

    New search for: Franquet, A.
    New search for: Douhard, B.
    New search for: Melkonyan, D.
    New search for: Favia, P.
    New search for: Conard, T.
    New search for: Vandervorst, W.

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    Self Focusing SIMS: Probing thin film composition in very confined volumes

    New search for: Franquet, A.
    New search for: Douhard, B.
    New search for: Melkonyan, D.
    New search for: Favia, P.
    New search for: Conard, T.
    New search for: Vandervorst, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Self Focusing SIMS: Probing thin film composition in very confined volumes

    New search for: Franquet, A.
    New search for: Douhard, B.
    New search for: Melkonyan, D.
    New search for: Favia, P.
    New search for: Conard, T.
    New search for: Vandervorst, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Self Focusing SIMS: Probing thin film composition in very confined volumes

    Contributors:

    Franquet, A. (author) / Douhard, B. (author) / Melkonyan, D. (author) / Favia, P. (author) / Conard, T. (author) / Vandervorst, W. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 365 ; 143-152

    Publication date:

    2016-01-01

    Size:

    10 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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