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Experimental observation of FIB induced lateral damage on silicon samples

Spoldi, G. / Beuer, S. / Rommel, M. / Yanev, V. / Bauer, A.J. / Ryssel, H.

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Experimental observation of FIB induced lateral damage on silicon samples

Spoldi, G. / Beuer, S. / Rommel, M. / Yanev, V. / Bauer, A.J. / Ryssel, H.

Experimental observation of FIB induced lateral damage on silicon samples

Spoldi, G. / Beuer, S. / Rommel, M. / Yanev, V. / Bauer, A.J. / Ryssel, H.

Access

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Export, share and cite

Document information

Title:

Experimental observation of FIB induced lateral damage on silicon samples

Contributors:

Spoldi, G. (author) / Beuer, S. (author) / Rommel, M. (author) / Yanev, V. (author) / Bauer, A.J. (author) / Ryssel, H. (author)

Publication date:

2008

DOI:

https://doi.org/10.24406/publica-fhg-360169

Type of media:

Miscellaneous

Type of material:

Electronic Resource

Language:

Unknown

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