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Design impact on three gate Dynamic Flash Memory (3G_DFM) for long hole retention time and robust disturbance shield
TCAD simulation using Silvaco software has shown that the 3G_DFM, which has SG1 (Select Gate 1), PL (Plate Line Gate), and SG2 (Select Gate 2) between SL (Source Line) and BL (Bit Line), has a long retention time of 100ms at 85 °C, and a robust disturbance shield which is a thousand times BL stress. The two select gates SG1 and SG2 protect the recombination of holes in the FB (Floating Body) at the SL and BL pn-junctions, and shield the BL stress arising during other page operations, which leads to the GIDL (Gate Induced Drain Leakage) current.
Design impact on three gate Dynamic Flash Memory (3G_DFM) for long hole retention time and robust disturbance shield
TCAD simulation using Silvaco software has shown that the 3G_DFM, which has SG1 (Select Gate 1), PL (Plate Line Gate), and SG2 (Select Gate 2) between SL (Source Line) and BL (Bit Line), has a long retention time of 100ms at 85 °C, and a robust disturbance shield which is a thousand times BL stress. The two select gates SG1 and SG2 protect the recombination of holes in the FB (Floating Body) at the SL and BL pn-junctions, and shield the BL stress arising during other page operations, which leads to the GIDL (Gate Induced Drain Leakage) current.
Design impact on three gate Dynamic Flash Memory (3G_DFM) for long hole retention time and robust disturbance shield
Koji Sakui (author) / Yisuo Li (author) / Masakazu Kakumu (author) / Kenichi Kanazawa (author) / Iwao Kunishima (author) / Yoshihisa Iwata (author) / Nozomu Harada (author)
2023
Article (Journal)
Electronic Resource
Unknown
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