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High-purity beta-phase silicon nitride preparation method through nitriding process
The invention relates to a high-purity beta-phase silicon nitride preparation method through a nitriding process. The high-purity beta-phase silicon nitride is obtained by high temperature nitriding of ganister sand in nitrogen furnace which is full of nitrogen. The high-purity beta-phase silicon nitride preparation method through the nitriding process is acted under low-voltage conditions, good in safety compared with other methods, guarantees the purity due to preprocessing of unstripped gases, adds ammonium chloride, adopts an intelligent temperature control system, is simple in operation, stable in reaction, stable in product quality, simple in equipment, low in cost and high in yield.
High-purity beta-phase silicon nitride preparation method through nitriding process
The invention relates to a high-purity beta-phase silicon nitride preparation method through a nitriding process. The high-purity beta-phase silicon nitride is obtained by high temperature nitriding of ganister sand in nitrogen furnace which is full of nitrogen. The high-purity beta-phase silicon nitride preparation method through the nitriding process is acted under low-voltage conditions, good in safety compared with other methods, guarantees the purity due to preprocessing of unstripped gases, adds ammonium chloride, adopts an intelligent temperature control system, is simple in operation, stable in reaction, stable in product quality, simple in equipment, low in cost and high in yield.
High-purity beta-phase silicon nitride preparation method through nitriding process
LIU ZAIXIANG (author) / DI QINGFA (author)
2015-08-26
Patent
Electronic Resource
English
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